Scanning thermal microscopy and its applications for quantitative thermal measurements
نویسندگان
چکیده
For more than 30 years, scanning thermal microscopy (SThM) has been used for imaging and quantitative measurements. It proven its usefulness investigations of the transport in nanoscale devices structures. However, because complexity heat phenomena, a analysis experimental results remains non-trivial task. This paper shows SThM state-of-art, beginning with equipment methodology measurements, through theoretical background ending selected examples applications. Every section concludes considerations on future development technique. Nowadays, passed from childhood into maturity stage to effective practical use materials research.
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ژورنال
عنوان ژورنال: Journal of Applied Physics
سال: 2022
ISSN: ['1089-7550', '0021-8979', '1520-8850']
DOI: https://doi.org/10.1063/5.0091494